Lithography Capabilities
February 21st, 2009
Scanning Electron Microscopes offer nanometer-scale resolution.
Equipped with 16-bit scan engine, Nova(TM) NanoSEM 50 Series uses retractable and in-lens detectors for SE, BSE, and STEM signal collection and filtering. Nova NanoSEM 450, featuring 110 mm stage with up to 75° motorized tilt, is suited for advanced material science applications. Equipped with 150 mm piezo-electric stage, Nova NanoSEM 650 provides 100% coverage of 6 in. wafers or masks. Both …
Cornell Nanotrophy